BECZ053 VLSI Technology Syllabus
AKTU B.Tech · 3rd Year · Unit-wise syllabus (effective 2024-25)
BECZ053 VLSI Technology (also written as KECZ053) is a subject in the 3rd year of the AKTU B.Tech programme, prescribed by Dr. A.P.J. Abdul Kalam Technical University with an L-T-P of 3-0-0. The syllabus is divided into 5 units: Introduction To IC Technology, Epitaxy and Oxidation, Lithography, Diffusion, Metallization and Packaging of VLSI devices. The complete unit-wise topic list, course outcomes and reference books are given below, taken from the official AKTU syllabus effective from 2024-25.
BECZ053 Subject Details
| Subject Code | BECZ053 / KECZ053 |
|---|---|
| Subject Name | VLSI Technology |
| University | Dr. A.P.J. Abdul Kalam Technical University (AKTU) |
| Course | B.Tech (Bachelor of Technology) |
| Year / Semester | 3rd Year |
| L-T-P | 3-0-0 |
| Total Units | 5 |
| Scheme Effective From | 2024-25 |
| Last Verified | 2026-08-19 |
BECZ053 VLSI Technology Unit-Wise Syllabus
Official AKTU syllabus (effective 2024-25) — 5 units.
Unit 1: Introduction To IC Technology
Introduction To IC Technology: SSI, MSI, LSI, VLSI Integrated Circuits.Crystal Growth and Wafer Preparation: Electronic Grade Silicon, Czochralski Crystal Growth, Silicon Shaping, Processing Considerations. Wafer Cleaning Technology - Basic Concepts, Wet cleaning, Dry cleaning
Unit 2: Epitaxy · Oxidation
Epitaxy: Vapor-Phase Epitaxy, Molecular Beam Epitaxy, Silicon onInsulators, Epitaxial Evaluation. Oxidation: Growth Kinetics, Thin Oxides, Oxidation Techniques and Systems, Oxides Properties.
Unit 3: Lithography
Lithography: Optical Lithography, Electron beam lithography, Photomasks, Wet Chemical Etching. Dielectric and Polysilicon Film Deposition: Deposition Processes of Polysilicon, Silicon Dioxide, Silicon Nitride.
Unit 4: Diffusion
Diffusion: Models of diffusion in solids, Fick’s 1-Dimensional diffusion equation, Diffusion of Impurities in Silicon and Silicon Dioxide, Diffusion Equations, Diffusion Profiles, Diffusion Furnace, Solid, Liquid and Gaseous Sources, Ion-Implantation: Ion-Implantation Technique, Range Theory, Implantation Equipment.
Unit 5: Metallization · Packaging of VLSI devices
Metallization: Metallization Application, Metallization Choices, Physical Vapor Deposition, Vacuum Deposition, Sputtering Apparatus. Packaging of VLSI devices: Package Types, Packaging Design Consideration, VLSI Assembly Technologies, Package Fabrication Technologies, CMOS fabrication steps.
BECZ053 Course Outcomes
- At the end of course, the student will be able to:
- CO 1 Interpret the basics of crystal growth, wafer preparation and wafer cleaning. K3, K5
- CO 2 Evaluate the process of Epitaxy and oxidation. K2, K3
- CO 3 Differentiate the lithography, etching and deposition process. K3, K4
- CO 4 Analyze the process of diffusion and ion implantation. K4, K5
- CO 5 Express the basic process involved in metallization and packaging. K2, K3
BECZ053 Reference Books
- S. M. Sze, "VLSI Technology", McGraw Hill Publication, 2nd Edition 2017
- S.K. Ghandhi, "VLSI Fabrication Principles", Willy-India Pvt. Ltd, 2008
Frequently Asked Questions about BECZ053
What is the syllabus of BECZ053 VLSI Technology?
The AKTU BECZ053 VLSI Technology syllabus is divided into 5 units: Introduction To IC Technology; Epitaxy and Oxidation; Lithography; Diffusion; Metallization and Packaging of VLSI devices. The complete topic list for each unit is published on this page, taken from the official Dr. A.P.J. Abdul Kalam Technical University syllabus effective from 2024-25.
How many units are there in BECZ053?
BECZ053 VLSI Technology has 5 units in the AKTU syllabus, with an L-T-P (Lecture-Tutorial-Practical) structure of 3-0-0.
Is BECZ053 the same subject as KECZ053?
Yes. AKTU renumbered its B.Tech subject codes from the 2022-23 session onwards, so the same subject appears as BECZ053 and KECZ053 depending on the scheme year. The syllabus content is the same.
Where can I download BECZ053 previous year question papers?
AKTU B.Tech previous year question papers for every semester are available to download free on Ryzenstudy, with no login or registration required.
Is this the official AKTU syllabus for BECZ053?
Yes. Every topic on this page is taken from the official Dr. A.P.J. Abdul Kalam Technical University syllabus document (AKTU B.Tech 3rd Year Electronics and Computer Engineering Syllabus), effective from 2024-25. A direct link to the original AKTU PDF is provided at the top of this page. Last verified on 2026-08-19.
Related AKTU Syllabus
Source: Dr. A.P.J. Abdul Kalam Technical University official syllabus — AKTU B.Tech 3rd Year Electronics and Computer Engineering Syllabus, effective from 2024-25. Ryzenstudy is not affiliated with AKTU. Content last verified on 2026-08-19.