B.TechSemester 62022-23Introduction To MemsKOE-063
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Introduction To Mems (KOE-063) - AKTU Question Paper 2022-23

B.Tech · Semester 6 · Free PDF Download

This is the official AKTU Introduction To Mems Previous Year Question Paper for B.Tech Semester 6, academic session 2022-23. Published by Dr. A.P.J. Abdul Kalam Technical University (AKTU/UPTU), Lucknow. Free PDF download — no login required.

Course:B.Tech
Semester:Semester 6
Session:2022-23
University:AKTU / UPTU

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Questions Asked in 2022-23

Introduction To Mems (KOE-063) — complete question paper

Section AAttempt all questions in brief. 2 x 10 = 20
  • a
    What are the different types of MEMS fabrication?
  • b
    Which What is piezoresistive sensor?
  • c
    What is Hooke’s law and modulus of elasticity?
  • d
    How do you calculate strain from bending stress?
  • e
    How much weight can a cantil ever take?
  • f
    What is the effect of damping in structural dynami cs?
  • g
    Differentiate between Couette flow and Poiseuille flow?
  • h
    Define electrostatic force with example. i. Write the principle of operation and types of MEMS resonator. j. What is thermocouple and its function?
Section BAttempt any three of the following: 10x3=30
  • a
    Describe the three principal signal transduction methods for micropressuresensors. Provide atleast one major advantage and one disadvantage of each of these methods
  • b
    Explain operating principle of pressure sen sor. Describe the representation process flow for fabricating pressure sensors
  • c
    Explain in brief the technique of PVD for MEMS d evice Fabrication. Also define step coverage and shadowing
  • d
    Design a pressure sensor with a memsmicro sensor s suitable for anengineering application
  • e
    Estimate the ratio of airflow in the section of small tube 10 μmin diameter and 1cm in length. Assume that a pressuredifference of 5 Pa is maintained between the inlet and outletof the tube section. The airflo w takes places at roomtemperature
Section CAttempt any one part of the following: 10x1=10
  • a
    With neat sketch describe the working principal of any twotype of micro- actuation techniques
  • b
    Write briefly about all the Substrate materials available in the market. List their applications individually
  • a
    Explain the concept of incompressible fluid flow inmicro conduit
  • b
    Differentiate between bulk and surface micro mac hining. Explain the role of sacrificial layer in fabrication of MEMS devices
  • a
    Draw and explain working principle of cantilever . Show basic quantitative behavior of cantilever. Also discuss process steps for fabrication of cantilever
  • b
    Design a micro actuator with a mems micro accelerom eter suitablefor an engineering application
  • a
    Calculate the electrostatic forces on the plate electrodes with an appliedDC voltage at 70V. The geometry and dimensions of the plate electrodeare shown in figure. The plate are initially misaligned by 20 pe rcent inboth length and width directions. Pyrex is used as the dielectricmaterial , so there is no gap change with the applied voltage
  • b
    Why are electrostatic forces used to run micro m otors rather thanconventional electromagnetic forces? Explain why this actuationt echnique is not used in macrodevices and machines
  • a
    Discuss the functioning of micro pressure sensor s with differentmeans of signal transduction with their relative merits
  • b
    Estimate the flow rate of a nitrogen gas in a se ction of minutetube 30 nm in diameter x 50 nm long. A pressure difference of0.5 Pa is applied to drive the flow. The flow is conducted atroom temperature, 20°C

Question text is extracted from the official AKTU question paper PDF above. Hindi translations are omitted — every question is printed in English in the original paper. Last verified: 2026-08-23.

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