B.TechSemester 62024-25Introduction To MemsBOE063

Introduction To Mems (BOE063) - AKTU Question Paper 2024-25

B.Tech · Semester 6 · Free PDF Download

This is the official AKTU Introduction To Mems Previous Year Question Paper for B.Tech Semester 6, academic session 2024-25. Published by Dr. A.P.J. Abdul Kalam Technical University (AKTU/UPTU), Lucknow. Free PDF download — no login required.

Course:B.Tech

Semester:Semester 6

Session:2024-25

University:AKTU / UPTU

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Questions Asked in 2024-25

Introduction To Mems (BOE063) — extracted question text · 70 marks · 3 Hours

Section A

1
Attemp tall questions in brief. 2x7=14 QNo. Question CO Level
a
Define MEMS and list two applications
b
What is the Piezo resistance effect?
c
State Hooke's Law in the context of beam structures
d
Explain the term "Moment of Inertia "for a beam
e
What is viscous flow in the context of air damping?
f
Differentiate between squeeze-film and slide-film air dampin g
g
What is the role of fringe effect sin electrostatic cactuati on?

Section BAttempt any three of the following: 7x3=21

a
Explain in brief the technique of PVD for MEMS device Fabrication and list their advantages
b
Derive the expression for the displacement of a cantilever beam under its own weight
c
Explain Reynolds' equations for squeeze-film air damping and their significance in MEMS
d
Describe the working principle of a parallel-plate actuator focusing on capacitive sensing
e
Discuss the design considerations for a MEMS resonator, including one- port modeling

Section CAttempt any one p a r t o f t h e f o l l o w i n g : 7 x 1 = 7

a
Explain the processes for micromachining in MEMS fabrication, highlighting the role of materials and substrates
b
Describe the Piezo resistive sensor and its application sin MEMS
a
Differentiate between bulk and surface micromachining. Explain the role of sacrificial layer in fabrication of MEMS devices
b
Discuss the mechanics of diaphragm structures in MEMS, focusing on stress and strain distribution
a
Derive the basic equations for slide-film air damping and compare the Couette-flow and Stokes-flow models
b
Explain in brief the effects of air damping on micro-dynamic s
a
Discuss the electrostatic force sin a parallel-plate actuator and their impact on mechanical actuation
b
Explain step voltage driving in electrostatic actuators and discuss the Negative Spring Effect and Vibration Frequency
a
Describe the working of thermocouples and their application in MEMS thermal sensors
b
Analyze the limitations of micro mechanical resonator sin RFMEMS applications

Question text is extracted from the official AKTU question paper PDF above. Check the original PDF for equations, diagrams and complete wording. Extracted: 2026-08-23.

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