B.TechSemester 62024-25Introduction To MemsBOE063

Introduction To Mems (BOE063) - AKTU Question Paper 2024-25

B.Tech · Semester 6 · Free PDF Download

This is the official AKTU Introduction To Mems Previous Year Question Paper for B.Tech Semester 6, academic session 2024-25. Published by Dr. A.P.J. Abdul Kalam Technical University (AKTU/UPTU), Lucknow. Free PDF download — no login required.

Course:B.Tech

Semester:Semester 6

Session:2024-25

University:AKTU / UPTU

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Questions Asked in 2024-25

Introduction To Mems (BOE063) — complete question paper · 70 marks · 3 Hours

Section A

1
Attemp tall questions in brief. 2x7=14 QNo. Question CO Level
a
Define MEMS and list two applications
b
What is the Piezo resistance effect?
c
State Hooke's Law in the context of beam structures
d
Explain the term "Moment of Inertia "for a beam
e
What is viscous flow in the context of air damping?
f
Differentiate between squeeze-film and slide-film air dampin g
g
What is the role of fringe effect sin electrostatic cactuati on?

Section BAttempt any three of the following: 7x3=21

a
Explain in brief the technique of PVD for MEMS device Fabrication and list their advantages
b
Derive the expression for the displacement of a cantilever beam under its own weight
c
Explain Reynolds' equations for squeeze-film air damping and their significance in MEMS
d
Describe the working principle of a parallel-plate actuator focusing on capacitive sensing
e
Discuss the design considerations for a MEMS resonator, including one- port modeling

Section CAttempt any one p a r t o f t h e f o l l o w i n g : 7 x 1 = 7

a
Explain the processes for micromachining in MEMS fabrication, highlighting the role of materials and substrates
b
Describe the Piezo resistive sensor and its application sin MEMS
a
Differentiate between bulk and surface micromachining. Explain the role of sacrificial layer in fabrication of MEMS devices
b
Discuss the mechanics of diaphragm structures in MEMS, focusing on stress and strain distribution
a
Derive the basic equations for slide-film air damping and compare the Couette-flow and Stokes-flow models
b
Explain in brief the effects of air damping on micro-dynamic s
a
Discuss the electrostatic force sin a parallel-plate actuator and their impact on mechanical actuation
b
Explain step voltage driving in electrostatic actuators and discuss the Negative Spring Effect and Vibration Frequency
a
Describe the working of thermocouples and their application in MEMS thermal sensors
b
Analyze the limitations of micro mechanical resonator sin RFMEMS applications

Question text is extracted from the official AKTU question paper PDF above. Hindi translations are omitted — every question is printed in English in the original paper. Last verified: 2026-08-23.

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