B.TechSemester 62023-24Introduction To MemsKOE063

Introduction To Mems (KOE063) - AKTU Question Paper 2023-24

B.Tech · Semester 6 · Free PDF Download

This is the official AKTU Introduction To Mems Previous Year Question Paper for B.Tech Semester 6, academic session 2023-24. Published by Dr. A.P.J. Abdul Kalam Technical University (AKTU/UPTU), Lucknow. Free PDF download — no login required.

Course:B.Tech

Semester:Semester 6

Session:2023-24

University:AKTU / UPTU

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Questions Asked in 2023-24

Introduction To Mems (KOE063) — complete question paper · 100 marks · 3 Hours

Section AAttempt all q u e s t i o n s i n b r i e f .

a
Name some materials commonly used in MEMS fabrication. 02
b
How are sensors and transducers important in MEMS devices? 02
c
Describe the displacement of beam structures under load. 02
d
How does viscosity a ffect air damping? 02
e
How does air damping affect MEMS dynamics? 02
f
What are some thermal effects in MEMS? 02
g
Explain step voltage driving in electrostatic actuation. 02
h
What are fringe effects in electrostatic actuation? 02 i. What is capacitive sensing in MEMS? 02 j. What are some applications of MEMS in RF? 02

Section BAttempt any three o f t h e f o l l o w i n g :

a
Explain the importance of materials and substrates selection in MEMS fabrication. 10
b
Discuss Hooke's Law and its application to the analysis of beam structures in MEMS. How does Hooke's Law relate stress to strain in these structures?
c
Explain the drag effect of a fluid and its relevance to MEMS devices. 10
d
Discuss the fringe effects in e lectrostatic actuation. How do these effects impact the performance and reliability of MEMS devices?
e
Describe the limitations of m icromechanical resonators in RF applications. 10

Section CAttempt any one p a r t o f t h e f o l l o w i n g :

a
Discuss the characte ristics of MEMS devices that make them suitable for various sensing and actuation applications
b
Describe the principles of pi ezoelectricity and its significance in MEMS. 10
a
Explain the concept of the moment of inertia in beam structu res. How is the moment of inertia calculated, and what is its significance in beam analysis?
b
Explain the concepts of stress and strain in the context of beam and diaphragm structures
a
Explain the drag effect of a fluid and its relevance to MEMS devices. How does the viscosity of a fluid affect the drag force on a moving object?
b
Explain Reynolds' equations for squeeze-film air damping. Ho w are these equations used to calculate the damping effect in MEMS devices?
a
Discuss the principles of elec trostatic forces and their application in MEMS devices. 10
b
Explain the negative spring effect in electrostatic actuatio n. How does this effect impact the vibration frequency and stability of MEMS devices?
a
Explain the principles of the rmocouples and their application in MEMS devices. 10
b
Discuss the modeling of one-port and two-port micromechanica l resonators in MEMS. 10

Question text is extracted from the official AKTU question paper PDF above. Hindi translations are omitted — every question is printed in English in the original paper. Last verified: 2026-08-23.

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